Argon Recovery Unit
Product Details
Processing gas volume: (1–1000) Nm³ 3/h
Pressure: ≤1.0 MPa
Argon purity: ≥99.999%
Dew point: ≤ -70°C
Pure argon oxygen content: ≤1.5 ppm
Widely used in:
Recovery and purification of argon in industries such as fiber optics, monocrystalline silicon, and polycrystalline silicon.
Argon Recovery in the Monocrystalline Silicon Industry (Argon Recovery Rate ≥ 95%)
According to the operational procedures of the single-crystal furnace, the recovered argon gas extracted by the vacuum pump is routed through a valve into the argon recovery unit. The recovered gas first passes through a blower and enters the inlet gas storage tank, then moves on to the pretreatment equipment to remove oil and impurities. It then proceeds to the subsequent argon purification units, where each type of impurity is systematically removed in accordance with the specific process requirements, ultimately achieving the desired gas purity for reuse.
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CONTACT US
Shandong Shaohua Gas Co., Ltd.
Phone: 40080 40085
Fax: +86 (535) 6013313
E-mail: ma0616@shaohuagas.com
Address: No. 5 Fengshan Road, Zhifu District, Yantai City, Shandong Province